deep trench isolation
由MForsberg著作·2004·被引用6次—Deeptrenches,usuallywithadepthlargerthanacoupleofmicrometers,aremainlyusedtoisolatedifferentdevicesanddevicegroups(wells)inCMOS/.BiCMOS ...,Deeptrenchisolation(DTI)structuresandmethodsofformingthesameareprovided.Ame...
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由DYoo著作·2023·被引用1次—Anautomotive2.1μmCMOSimagesensorhasbeendevelopedwithafull-depthdeeptrenchisolationandanadvancedreadoutcircuittechnology.
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